Fully automatic Wafer sorting equipment

ASW6000 series wafer sorting equipment supports wafer mutual transfer between 2-6 PORTs, is compatible with SEMI standard Foup, Fosb and Open Cassette, and is equipped with microenvironment clean keeping system, which can meet the cleanliness requirements of Class1. Equipped with double-sided wafer barcode reading system and wafer inversion function, it can be applied to various application scenarios of wafer transmission. Suitable for sorting and transmission of 8-12 inch wafers.

Product features

• Processable thin wafer
• The modes such as wafer carrier and material box for unloading
• Wafer sorting function
• Wafer rewinding function
• SECS/GEM or simple networking function
• Modular design

Technical specification and parameter

• Wafer size: 8"~ 12"
• Power consumption: AC220V 10A
• Control system: PC+PLC control